Fabrication and Characterization of Electrostatically Actuated Microcantilever Mass Sensors
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Journal of Sensor Science and Technology
سال: 2011
ISSN: 1225-5475
DOI: 10.5369/jsst.2011.20.1.40